Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper

dc.creator	He, Xingliang
dc.creator	Chen, Yunyun
dc.creator	Zhao, Huijia
dc.creator	Sun, Haoming
dc.creator	Lu, Xinchun
dc.creator	Liang, Hong
dc.date.accessioned	2019-10-09T15:40:44Z
dc.date.available	2019-10-09T15:40:44Z
dc.date.issued	2013
dc.identifier.issn	2223-7690
dc.identifier.issn	2223-7704
dc.identifier.uri	https://hdl.handle.net/1969.1/180300
dc.format.extent	5	en
dc.publisher	Friction
dc.relation.ispartof	1foldr Import 2019-10-08 Batch 4	en
dc.relation.uri	10.1007/s40544-013-0017-z	en
dc.title	Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper	en