Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper
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He, Xingliang; Chen, Yunyun; Zhao, Huijia; Sun, Haoming; Lu, Xinchun; Liang, Hong (2013). Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper. Friction. Available electronically from https : / /hdl .handle .net /1969 .1 /180300.