Mid-infrared integrated photonics for chemical sensing

Abstract

A waveguide structure including a mid-infrared-transparent waveguide on a mid-infrared-transparent undercladding may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. In some embodiments, a sensor including an amorphous-silicon waveguide on a barium-titanate undercladding can operate at wavelengths ranging from 2.5 .mu.m to about 7 .mu.m; this sensor may be manufactured by epitaxial growth of the undercladding on a substrate, followed by CMOS-compatible creation of the waveguide. Additional embodiments are disclosed.