Mid-infrared integrated photonics for chemical sensing
Abstract
A waveguide structure including a mid-infrared-transparent waveguide on a mid-infrared-transparent undercladding may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. In some embodiments, a sensor including an amorphous-silicon waveguide on a barium-titanate undercladding can operate at wavelengths ranging from 2.5 .mu.m to about 7 .mu.m; this sensor may be manufactured by epitaxial growth of the undercladding on a substrate, followed by CMOS-compatible creation of the waveguide. Additional embodiments are disclosed.
Subject
G02B 6/102C30B 25/18
G01N 21/7703
G01N 21/35
G01N 2201/0846
G02B 6/136
G02B 2006/12097
G02B 2006/12138
G02B 2006/12061
Collections
Citation
Lin, Pao Tai (2020). Mid-infrared integrated photonics for chemical sensing. United States. Patent and Trademark Office; Texas A&M University. Libraries. Available electronically from https : / /hdl .handle .net /1969 .1 /188824.