dc.creator | Crooks, Richard M. | |
dc.creator | Kim, Taisun | |
dc.creator | Chan, Kwok-Chu | |
dc.creator | Schoer, Jonathan K. | |
dc.date.accessioned | 2019-06-17T16:55:16Z | |
dc.date.available | 2019-06-17T16:55:16Z | |
dc.date.issued | 1999-03-23 | |
dc.identifier.uri | https://hdl.handle.net/1969.1/176611 | |
dc.description.abstract | A self-assembled multilayer and in particular polymeric self-assembled multilayer can be effectively produced from two or more self-assembled monolayers on a substrate where each of the self-assembled monolayers is produced for a block containing a first functional group and a second functional group where the second functional group is reacted with the first functional group. The production of polymerizable, self-assembled mono- and multi-layers from, e.g., blocks containing at least two acetylene groups and/or polymerizable end groups, is also provided. The polymerized mono- or multilayer can be employed in a variety of applications including photolithography. | en |
dc.language | eng | |
dc.publisher | United States. Patent and Trademark Office | |
dc.rights | Public Domain (No copyright - United States) | en |
dc.rights.uri | http://rightsstatements.org/vocab/NoC-US/1.0/ | |
dc.title | Polymeric self-assembled mono- and multilayers and their use in photolithography | en |
dc.type | Utility patent | en |
dc.format.digitalOrigin | reformatted digital | en |
dc.description.country | US | |
dc.contributor.assignee | The Texas A&M University System | |
dc.identifier.patentapplicationnumber | 08/631213 | |
dc.subject.uspcprimary | 430/325 | |
dc.subject.uspcother | 156/272.2 | |
dc.subject.uspcother | 156/275.5 | |
dc.subject.uspcother | 428/420 | |
dc.subject.uspcother | 430/323 | |
dc.subject.uspcother | 430/324 | |
dc.date.filed | 1996-04-12 | |
dc.publisher.digital | Texas A&M University. Libraries | |
dc.subject.cpcprimary | B05D 1/185 | |
dc.subject.cpcprimary | B82Y 30/00 | |
dc.subject.cpcprimary | B82Y 40/00 | |
dc.subject.cpcprimary | G03F 7/025 | |
dc.subject.cpcprimary | G03F 7/165 | |
dc.subject.cpcprimary | B82Y 10/00 | |
dc.subject.cpcprimary | Y10T 428/31536 | |