Now showing items 1-2 of 2

    • Babb, Michael Everett; Harris, Harlan Rusty (United States. Patent and Trademark Office; Texas A&M University. Libraries, 2022-04-12)
      A method of making a semiconductor device includes depositing an amorphous layer on a substrate, masking a portion of the amorphous layer, removing a portion of the amorphous layer to form a first channel into the amorphous ...
    • Babb, Michael Everett; Harris, Harlan Rusty (United States. Patent and Trademark Office; Texas A&M University. Libraries, 2021-09-14)
      A lateral superjunction includes a substrate layer, a selective epitaxy layer deposited on the substrate layer, a trench formed into the selective epitaxy layer to expose a portion of the substrate layer, a first layer of ...