Browsing by Subject "H01L 21/0242"

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    • Fabrication of lateral superjunction devices using selective epitaxy 
      Babb, Michael Everett; Harris, Harlan Rusty (United States. Patent and Trademark Office; Texas A&M University. Libraries, 2021-09-14)
      A lateral superjunction includes a substrate layer, a selective epitaxy layer deposited on the substrate layer, a trench formed into the selective epitaxy layer to expose a portion of the substrate layer, a first layer of ...