The effects of palmar feedback in 200mm Reticle Standard Mechanical Interface (SMIF) Pod handles with respect to hand pressure distribution and user preference

Abstract

The primary objective of this study was to determine the preferred 200mm Reticle Standard Mechanical Interface (SMIF) Pod handle when comparing a handle with palmar feedback and a handle without palmar feedback. Objectively, load cells were used to record the pressure distribution between the subject's hand and the Asyst Technologies, Inc. SMIF Pod handles; and subjectively, questionnaires were used to determine the subject's overall handle preference. The data was collected from 36 Texas Instruments wafer fabrication workers, between 25 and 58 years of age. In order to make the non-feedback/feedback comparison, the PSN1-Palm Feedback was developed. The PSN1-Palm Feedback, is a contoured padding designed to fit between the SMIF Pod handle and the subjects' hands. The design was developed using a combination of a self-drying modeling compound and coating epoxy materials. This study accomplished the goal of verifying the subjects' preference for palmar feedback, creating the PSN1-Palm Feedback as a guideline for SMIF-Pod palm padding, acquiring sensor data for nearly 60% of the pod's weight, and contributing to the science of ergonomics in the semiconductor industry. The sensor results are consistent with the results from the questionnaires. The sensor results from the thumb, forefinger, and handle side were statistically equal. However, they validated the results of the survey questions related to the subject pod handling confidence, handle likeability, and perceived pressure at the forefinger and thumb. The statistically significant results from the center handle were agreeable with the statistically significant grip acceptability questionnaire results. Nearly 53% of the subjects preferred the non-feedback handle. However, 63% of this group stated they liked the PSN1-Palm Feedback handle, provided certain revisions. 56% of all subjects liked the PSN1-Palm Feedback handle, but thought the padding should be thinner. The results of this study show that both treatments were well liked; therefore, the subjects' comments about each treatment were emphasized to obtain additional insight. The padding provided additional comfort to the molded plastic handles currently in use.