Short-wavelength coherence tomography

dc.creator	Paulus, Gerhard Georg
dc.creator	Rodel, Christian
dc.date.accessioned	2019-06-17T17:04:33Z
dc.date.available	2019-06-17T17:04:33Z
dc.date.issued	2010-02-02
dc.identifier.uri	https://hdl.handle.net/1969.1/176913
dc.description.abstract	The present relates generally to methods, systems and apparatuses for three dimensional and cross-sectional imaging of objects (e.g., silicon) and subjects at a nanometer-scale resolution using short wave-length (e.g., extreme ultra-violet) light.	en
dc.language	eng
dc.publisher	United States. Patent and Trademark Office
dc.rights	Public Domain (No copyright - United States)	en
dc.rights.uri	http://rightsstatements.org/vocab/NoC-US/1.0/
dc.title	Short-wavelength coherence tomography	en
dc.type	Utility patent	en
dc.format.digitalOrigin	reformatted digital	en
dc.description.country	US
dc.contributor.assignee	The Texas A&M University System
dc.contributor.assignee	Rodel, Christian
dc.identifier.patentapplicationnumber	12/038753
dc.subject.uspcprimary	356/497
dc.date.filed	2008-02-27
dc.publisher.digital	Texas A&M University. Libraries
dc.subject.cpcprimary	G01B 9/02044
dc.subject.cpcprimary	G01B 9/02057
dc.subject.cpcprimary	G01B 9/02091
dc.subject.cpcprimary	G01B 9/02014
dc.subject.cpcprimary	G01N 21/4795