Short-wavelength coherence tomography
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The present relates generally to methods, systems and apparatuses for three dimensional and cross-sectional imaging of objects (e.g., silicon) and subjects at a nanometer-scale resolution using short wave-length (e.g., extreme ultra-violet) light.
Paulus, Gerhard Georg; Rodel, Christian (2010). Short-wavelength coherence tomography. United States. Patent and Trademark Office; Texas A&M University. Libraries. Available electronically from