Abstract
Electron storage rings are sources of synchrotron radiation in the soft and hard parts of the x-ray spectrum. X-ray lithography is an ideal candidate technology for the production of microelectronic devices with sizes between 0.3-0.5 microns. Industrial x-ray lithography requires the x-ray source, which is the electron storage ring, to be as compact and reliable as possible. In this thesis I review and develop the basic physical principles governing the design of compact electron synchrotrons for x-ray lithography. I explore the various aspects of lattice design for this application. I argue that the optimal storage ring design consists of a four fold symmetric cell lattice with two quadrupole families and 90° zero gradient dipole magnets. I demonstrate that radiation requirements for lithography and the use of zero gradient magnetic dipole fields constrains the lattice to four or more dipole magnets. I develop a lattice design for x-ray lithography following this logic. I then develop a dipole magnet design for a machine using this lattice. Particle tracking data is integrated into the magnet design and used to optimize the end coil configurations of the magnets. I then review the magnet's physical construction and measurement. I develop a cryogenic Hall probe mapping apparatus for this magnet and measure its excitation curves.
Swenson, Charles Allen (1992). A compact electron storage ring design. Texas A&M University. Texas A&M University. Libraries. Available electronically from
https : / /hdl .handle .net /1969 .1 /DISSERTATIONS -1292997.