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| dc.creator | Mendicino, L. | |
| dc.creator | McCormack, K. | |
| dc.creator | Gibson, S. | |
| dc.creator | Patton, B. | |
| dc.creator | Lyon, D. | |
| dc.creator | Covington, J. | |
| dc.date.accessioned | 2010-07-08T14:24:48Z | |
| dc.date.available | 2010-07-08T14:24:48Z | |
| dc.date.issued | 1998-04 | |
| dc.identifier.other | ESL-IE-98-04-21 | |
| dc.identifier.uri | https://hdl.handle.net/1969.1/91151 | |
| dc.description.abstract | The semiconductor industry uses large amounts of Ultrapure Water (UPW) in the wafer fabrication process. Producing UPW involves energy-intensive operations, such as membrane separations, ultraviolet lamps, and continuous pumping and recirculation systems. Indirect energy costs can also be allocated to steps in the UPW process. Motorola recognizes that by reducing UPW consumption, energy savings will result. Energy conservation can also be achieved by improving the UPW generation process itself and by recycling or reclaiming UPW and other water streams. | en |
| dc.language.iso | en_US | |
| dc.publisher | Energy Systems Laboratory (http://esl.tamu.edu) | |
| dc.subject | Semiconductor Industry | en |
| dc.subject | Ultrapure Water Consumption | en |
| dc.title | Energy Conservation Through Water Usage Reduction in the Semiconductor Industry | en |
| dc.type | Presentation | en |
This item appears in the following Collection(s)
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IETC - Industrial Energy Technology Conference
Industrial Energy Technology Conference