Motorola's Exhaust Optimization Program: Tracer Gas Application for Gas Panel Enclosures

Abstract

The Motorola Exhaust Optimization Program strives toward identifying the optimum exhaust requirements for gas panel enclosures to help conserve energy and provide future exhaust capacity for new tools. Various Motorola studies have shown that at least 20% of total fab electrical usage is attributed to make-up air fans, exhaust fans, and chilled water systems for recirculation and make-up air. This is equivalent to over 35 million kWh per a year for a typical Motorola Semiconductor Products Sector (SPS) fab. These obtained studies have prompted Motorola to focus on a broad range of energy conservation projects. This paper will focus on exhaust optimization through tracer gas testing. Testing has resulted in exhaust and make-up air reductions of as high as 70% of manufacturer's specifications per gas enclosure. This approach leads to energy conservation and infrastructure cost avoidance for new exhaust fans, ductwork, abatement equipment, and make-up air systems.