dc.contributor.advisor | Kim, Won-jong | |
dc.creator | Yu, Ho | |
dc.date.accessioned | 2005-11-01T15:47:09Z | |
dc.date.available | 2005-11-01T15:47:09Z | |
dc.date.created | 2005-08 | |
dc.date.issued | 2005-11-01 | |
dc.identifier.uri | https://hdl.handle.net/1969.1/2603 | |
dc.description.abstract | This thesis presents the controller design and implementation of a high-precision 6-degree-of-freedom (6-DOF) magnetically levitated (maglev) positioner. This high-precision positioning system consists of a novel concentrated-field magnet matrix and a triangular single-moving part that carries three 3-phase permanent-magnet linear-levitation-motor armatures. Since only a single levitated moving part, namely the platen, generates all required fine and coarse motions, this positioning system is reliable and low-cost. Three planar levitation motors based on the Lorentz-force law not only generate the vertical force to levitate the triangular platen but control the platen??s position and orientation in the horizontal plane. All 6-DOF motions are controlled by magnetic forces only. The platen is regarded a pure mass system, and the spring and damping coefficients are neglected except for the vertical directions. Single-input single-output (SISO) digital lead-lag controllers are designed and implemented on a digital signal processor (DSP). This 6-DOF fully magnetically levitated positioner has a total mass of 5.91 kg and currently exhibits a 120 mm ?? 120 mm travel range. This positioner is highly suitable for semiconductor-manufacturing applications such as wafer steppers. Several experimental motion profiles are presented to demonstrate the maglev stage??s capability of accurately tracking any planar and 3-D paths. | en |
dc.format.extent | 1568101 bytes | en |
dc.format.medium | electronic | en |
dc.format.mimetype | application/pdf | |
dc.language.iso | en_US | |
dc.publisher | Texas A&M University | |
dc.subject | nanoscale microscale precision positioning | en |
dc.subject | control | en |
dc.title | Controller design and implementation for a 6-degree-of-freedom magnetically levitated positioner with high precision | en |
dc.type | Book | en |
dc.type | Thesis | en |
thesis.degree.department | Mechanical Engineering | en |
thesis.degree.discipline | Mechanical Engineering | en |
thesis.degree.grantor | Texas A&M University | en |
thesis.degree.name | Master of Science | en |
thesis.degree.level | Masters | en |
dc.contributor.committeeMember | Boyd, James G. | |
dc.contributor.committeeMember | Parlos, Alexander G. | |
dc.type.genre | Electronic Thesis | en |
dc.type.material | text | en |
dc.format.digitalOrigin | born digital | en |