Dynamics and Controls of Fluidic Pressure-Fed Mechanism (FPFM) of Nanopositioning System

Abstract

Flexure or compliant mechanisms are employed in many precisions engineered devices due to their compactness, linearity, resolution, etc. Yet, critical issues remain in motion errors, thermal instability, limited bandwidth, and vibration of dynamic systems. Those issues cannot be negligible to maintain high precision and accuracy for precision engineering applications. In this thesis, a novel fluidic pressure-fed mechanism (FPFM) is proposed and investigated. The proposed method is designing internal fluidic channels inside the spring structure of the flexure mechanism using the additive manufacturing (AM) process to overcome addressed challenges. By applying pneumatic/hydraulic pressure and filling media into fluidic channels, dynamic characteristics of each spring structure of the flexure mechanism can be altered or adjusted to correct motion errors, increase operating speed, and suppress vibration. Additionally, FPFM can enhance thermal stability by flowing fluids without affecting the motion quality of the dynamic system. Lastly, the motion of the nanopositioning system driven by FPFM can provide sub-nanometer resolution motion, and this enables the nanopositioning system to have two linear motion in a monolithic structure. The main objective of this thesis is to propose and validate the feasibility of FPFM that can ultimately be used for a monolithic FPFM dual-mode stage for providing high positioning performance without motion errors while reducing vibration and increasing thermal stability and bandwidth.