Browsing by Subject "tantalum"
Now showing items 1-2 of 2
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(2014-12-11)The work presented herein will discuss the synthesis, characterization and reactivity of electrophilic organometallic compounds of ruthenium, tantalum, and silicon in order to explore unusual properties, reactivity, or ...
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(2012-02-14)Electrochemical Mechanical Polishing (ECMP) has become increasingly important due to the continuous decrease of the device size in integrated circuit (IC) fabrication. Tantalum (Ta) is a promising material as a substitute ...