Browsing by Subject "amorphous silicon"
Now showing items 1-2 of 2
-
(2016-11-08)For hydrogenated amorphous silicon (a-Si:H) thin film PIN diodes fabricated using plasma-enhanced chemical vapor deposition, the effects of the n^+ layer deposition power, the existence of an aluminum reflector layer, and ...
-
(2014-05-07)The PECVD intrinsic, n^(+), and p^(+) a-Si:H thin film deposition processes have been studied by the optical emission spectroscope to monitor the plasma phase chemistry. Process parameters, such as the plasma power, ...