Browsing by Subject "Semiconductor"
Now showing items 1-4 of 4
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(2009-05-15)As VLSI technology scales to 65nm and below, traditional communication between design and manufacturing becomes more and more inadequate. Gone are the days when designers simply pass the design GDSII file to the foundry and ...
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In-situ temperature and thickness characterization for silicon wafers undergoing thermal annealing (Texas A&M University, 2004-11-15)Nano scale processing of IC chips has become the prime production technique as the microelectronic industry aims towards scaling down product dimensions while increasing accuracy and performance. Accurate control of ...
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(2017-12-11)We employ cross–sectional scanning tunneling microscopy (STM) to examine how an as–grown InAs/InAsSb superlattice differs from the intended one as regards translational invariance in (001) planes perpendicular to the growth ...
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(2022-12-08)With the goal of creating a new photomask inspection system, this research represents the design flow for the enhanced knife-edge interferometry (EKEI)-based photomask inspection system. In this study, the market and the ...