Browsing by Subject "Photolithography"
Now showing items 1-3 of 3
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The Bosch process is a type of deep reactive-ion etching (DRIE) of silicon. It is a type of plasma etching, or dry etching, that uses physical and chemical processes to etch the surface of a silicon sample. Due to its ...
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(2010-10-12)Nanochannel devices have been explored over the years with wide applications in bio/chemical analysis. With a dimension comparable to many bio-samples, such as proteins, viruses and DNA, nanochannels can be used as a ...
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(2022-11-15)Finding the nature of dark matter is one of the biggest quest in physics today. One of the various methods for dark matter detection is direct detection in which the interaction between dark matter and the normal matter ...