Browsing by Subject "Channeling (Physics)"
Now showing items 1-2 of 2
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(Texas A&M University. Libraries, 1990)Various orientations of undoped single crystal silicon were examined from the standpoint of transmitted half-angle to determine the best orientation for masked ion beam lithography (MIBL). The effect of boron, present at ...
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(Texas A&M University, 1990)Not available