Browsing by Author "Covington, J."
Now showing items 1-1 of 1
-
Mendicino, L.; McCormack, K.; Gibson, S.; Patton, B.; Lyon, D.; Covington, J. (Energy Systems Laboratory (http://esl.tamu.edu), 1998-04)The semiconductor industry uses large amounts of Ultrapure Water (UPW) in the wafer fabrication process. Producing UPW involves energy-intensive operations, such as membrane separations, ultraviolet lamps, and continuous ...