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Energy Efficiency in the Microelectronics Industry
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The rapid advance of technology towards shrinking circuits and increasing speed of execution is coupled by the demand for enhanced manufacturing rates and fuller equipment utilization. This puts renewed emphasis on understanding the way energy is utilized to meet the current and future objectives. In the Microelectronics Industry the use of Electricity far outweighs any other utility usage viz. Water, Natural Gas by at least a three to one ratio on a cost basis. Starting with a typical 100,000 S.F. manufacturing facility as the basis for simulation and analysis this paper logically goes through the parameters needed to establish the the Electric Profile and then identifies the key components which contribute to this profile. Once an understanding of the components is achieved further analysis is presented to study the areas which are major impact sources such as Chilled Water and Air Distribution and how a system approach to understanding these can result in developing energy efficient sites for this industry.
Bhatti, B. (1998). Energy Efficiency in the Microelectronics Industry. Energy Systems Laboratory (http://esl.tamu.edu). Available electronically from