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| dc.creator | Hinson, S. R. | |
| dc.date.accessioned | 2010-06-14T16:49:47Z | |
| dc.date.available | 2010-06-14T16:49:47Z | |
| dc.date.issued | 2000-04 | |
| dc.identifier.other | ESL-IE-00-04-35 | |
| dc.identifier.uri | https://hdl.handle.net/1969.1/90902 | |
| dc.description.abstract | This paper presents the basic concepts in performing an energy and power audit of a semiconductor process tool. A protocol exists that fully describes these measurements and their use and applicability and it will be described. This protocol is currently being examined by SEMATECH for future publication. Example data will be presented showing the power, energy, and current load profiles of a typical tool. | en |
| dc.language.iso | en_US | |
| dc.publisher | Energy Systems Laboratory (http://esl.tamu.edu) | |
| dc.subject | Semiconductor Process Tool | en |
| dc.subject | Energy and Power Audit Protocol | en |
| dc.title | Electrical Usage Characterization of Semiconductor Processing Tools | en |
| dc.type | Presentation | en |
This item appears in the following Collection(s)
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IETC - Industrial Energy Technology Conference
Industrial Energy Technology Conference