SEMI S2, EQUIPMENT SAFETY GUIDELINE AND RELATED SAFETY STANDARDS FOR THE SEMICONDUCTOR INDUSTRY
Abstract
What is safe semiconductor manufacturing equipment? Does meeting the regulatory requirements make it safe? How much risk management is necessary to make equipment safe? The semiconductor industry has a challenge in providing equipment that meets the objective of providing an injury free work place for it personnel while meeting the technology challenges that drive the industry. Semiconductor manufacturing equipment is some of the most complex and advanced manufacturing equipment in the world. Add to that, that the equipment obsoletes itself ever other technology generation. Today’s leading edge technology generations are 12-18 months in duration. Facing this challenge, several visionaries in the mid 80 began an effort to create a standard that would reduce the risk of semiconductor equipment and still be able to keep pace with the ever changing technology. SEMI S2 is a risk management guideline and was not designed to be a regulation as written. Since it’s creation in 91, SEMI S2 has been adopted by many regulatory agencies. The success of this unintended adoption has been mixed. Today the industry is working on finding a common path that will continue to meet the industry needs and satisfy regulatory agencies.
Description
PresentationSubject
SEMI S2Collections
Citation
Gartman, W. Richard (1999). SEMI S2, EQUIPMENT SAFETY GUIDELINE AND RELATED SAFETY STANDARDS FOR THE SEMICONDUCTOR INDUSTRY. Mary Kay O'Connor Process Safety Center; Texas &M University. Libraries. Available electronically from https : / /hdl .handle .net /1969 .1 /193899.