Flexible mid-infrared photonics for chemical sensing
Abstract
A flexible waveguide structure including a waveguide on a flexible substrate, both having transparent windows in the mid-infrared range, may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. Such a sensor may, in accordance with some embodiments, be formed by an aluminum-nitride waveguide on a borosilicate substrate.
Subject
G01N 21/255G01N 21/35
G01N 21/3504
G01N 21/3577
G01N 21/7703
G02B 6/102
G01N 2201/0873
G02B 6/132
G02B 2006/12035
G02B 2006/12097
Collections
Citation
Lin, Pao Tai (2020). Flexible mid-infrared photonics for chemical sensing. United States. Patent and Trademark Office; Texas A&M University. Libraries. Available electronically from https : / /hdl .handle .net /1969 .1 /188131.