Browsing by Subject "Nanopositioning"
Now showing items 1-3 of 3
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(2020-11-09)Flexure or compliant mechanisms are employed in many precisions engineered devices due to their compactness, linearity, resolution, etc. Yet, critical issues remain in motion errors, thermal instability, limited bandwidth, ...
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(2012-02-14)This dissertation demonstrates that a magnetic-levitation (maglev) stage has the capabilities to control movements and reject vibration simultaneously. The mathematical model and vibration control scheme with a 6-degree-of-freedom ...
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(2015-11-23)This dissertation presents the electromagnetic design and experimental validation of a new framework for linear permanent-magnet (PM) machines with targeted applications in precision motion control. In this framework, a ...