Browsing by Subject "Lithography"
Now showing items 1-5 of 5
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(2009-05-15)Moore’s Law has driven a continuous demand for decreasing feature sizes used in Very Large Scale Integrated (VLSI) technology which has outpaced the solutions offered by lithography hardware. Currently, a light wavelength ...
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(2011-08-04)Numerous studies have been conducted using porphyrin molecules on various substrates to investigate their diverse photoelectrochemical, catalytic, electronic, and biochemical properties. These properties make porphyrin ...
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(2020-04-08)Microfluidic PCR is one of the most common and widely used sample preparation techniques. Most heating methods for microfluidic PCR are heated in one of two ways: (1) the reaction is pumped between different boundary-heating ...
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(2022-12-08)With the goal of creating a new photomask inspection system, this research represents the design flow for the enhanced knife-edge interferometry (EKEI)-based photomask inspection system. In this study, the market and the ...
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(2009-05-15)As devices and new technologies continue to shrink, nanocrystalline multi-metal compounds are becoming increasingly important for high efficiency and multifunctionality. However, synthetic methods to make desirable ...