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    • Sub-wavelength lithography via Rabi oscillations 

      Al-amri, Mohammad D.; Liao, Zeyang; Zubiary, Muhammad Suhail (United States. Patent and Trademark OfficeTexas A&M University. Libraries, 2013-09-24)
      A sub-wavelength photolithographic method includes exposing a photoresist material to a stimulating electromagnetic source prior to further exposing the photoresist material to a dissociating electromagnetic source. The ...