Browsing by Subject "430/322"
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Sub-wavelength lithography via Rabi oscillations
(United States. Patent and Trademark OfficeTexas A&M University. Libraries, 2013-09-24)A sub-wavelength photolithographic method includes exposing a photoresist material to a stimulating electromagnetic source prior to further exposing the photoresist material to a dissociating electromagnetic source. The ... -
Sub-wavelength lithography via rabi oscillations
(United States. Patent and Trademark OfficeTexas A&M University. Libraries, 2013-11-05)A sub-wavelength photolithographic method includes exposing a photoresist material to a stimulating electromagnetic source prior to further exposing the photoresist material to a dissociating electromagnetic source. The ...