Browsing by Subject "430/322"

Now showing items 1-2 of 2

    • Sub-wavelength lithography via rabi oscillations 

      Zubairy, Muhammad Suhail; Liao, Zeyang; Al-amri, Mohammad D. (United States. Patent and Trademark OfficeTexas A&M University. Libraries, 2013-11-05)
      A sub-wavelength photolithographic method includes exposing a photoresist material to a stimulating electromagnetic source prior to further exposing the photoresist material to a dissociating electromagnetic source. The ...

    • Sub-wavelength lithography via Rabi oscillations 

      Al-amri, Mohammad D.; Liao, Zeyang; Zubiary, Muhammad Suhail (United States. Patent and Trademark OfficeTexas A&M University. Libraries, 2013-09-24)
      A sub-wavelength photolithographic method includes exposing a photoresist material to a stimulating electromagnetic source prior to further exposing the photoresist material to a dissociating electromagnetic source. The ...