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dc.contributor.advisorZhang, Xinghangen_US
dc.creatorJain, Vibhor Vinodkumaren_US
dc.date.accessioned2010-01-14T23:56:14Zen_US
dc.date.accessioned2010-01-16T01:55:23Z
dc.date.available2010-01-14T23:56:14Zen_US
dc.date.available2010-01-16T01:55:23Z
dc.date.created2007-08en_US
dc.date.issued2009-05-15en_US
dc.identifier.urihttp://hdl.handle.net/1969.1/ETD-TAMU-1561
dc.description.abstractCopper has become the metal of choice for metallization, owing to its high electrical and thermal conductivity, relatively higher melting temperature and correspondingly lower rate of diffusivity. Most of the current studies can get high strength copper thin films but on an expense of conductivity. This study proposes a technique to deposit high strength and high conductivity copper thin films on different silicon substrates at room temperature. Single crystal Cu (100) and Cu (111) have been grown on Si (100) and Si (110) substrates, respectively. Single crystal Cu (111) films have a high density of growth twins, oriented parallel to the substrate surface due to low twin boundary energy and a high deposition rate. The yield strengths of these twinned Cu films are much higher than that of bulk copper, with an electrical resistivity value close to that of bulk copper. X-ray diffraction, transmission electron microscopy and nanoindentation techniques were used to show that high density twins are sole reason for the increase in hardness of these thin films. The formation of growth twins and their roles in enhancing the mechanical strength of Cu films while maintaining low resistivity are discussed.en_US
dc.format.mediumelectronicen_US
dc.format.mimetypeapplication/pdfen_US
dc.language.isoen_USen_US
dc.subjectMicrostructureen_US
dc.subjectCopper thin filmen_US
dc.subjectSilicon Substratesen_US
dc.titleMicrostructure and properties of copper thin films on silicon substratesen_US
dc.typeBooken
dc.typeThesisen
thesis.degree.departmentMechanical Engineeringen_US
thesis.degree.disciplineMechanical Engineeringen_US
thesis.degree.grantorTexas A&M Universityen_US
thesis.degree.nameMaster of Scienceen_US
thesis.degree.levelMastersen_US
dc.contributor.committeeMemberHartwig, Karlen_US
dc.contributor.committeeMemberWang, Haiyanen_US
dc.type.genreElectronic Thesisen_US
dc.type.materialtexten_US
dc.format.digitalOriginborn digitalen_US


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