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The Technical and Economic Potential for Electricity Energy Efficiency in a Semiconductor Manufacturing Plant
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In recent years, there has been renewed interest in energy efficiency in the semiconductor industry. The declining prices for semiconductor products has prompted semiconductor manufacturing plants to control costs so as to maintain profitability. This paper presents the potential for energy efficiency improvements at a semiconductor manufacturing plant from various energy efficiency measures such as high efficiency motors, adjustable speed drive motors, high efficiency HVAC, and high efficiency lighting. The effort was part of a utility-sponsored technical potential study. Although this paper describes energy efficiency options in a specific facility, the recommended actions have broad application. In this study, the results show that none of the group replacement with high efficiency motors, adjustable speed drive motors, and high efficiency lighting would yield paybacks of less than 3 years. However, the end-of-useful life replacement with high efficiency motors for abatement of exhaust and deionizing of water as well as high efficiency lighting would yield paybacks of less than 3 years. The installation of adjustable speed drive motors at the end of useful life would not yield average paybacks of less than 3 years. Although specific implementation plans to achieve the energy savings are not outlined in this paper, it is hoped that the results of this analysis will identify areas which merit further engineering and economic analyses.
Lee, A. H. W.; Golden, J. W.; Zarnikau, J. W. (1997). The Technical and Economic Potential for Electricity Energy Efficiency in a Semiconductor Manufacturing Plant. Energy Systems Laboratory (http://esl.tamu.edu). Available electronically from