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Cleanroom Energy Optimization Methods
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The design and operation of semiconductor cleanrooms play an important role in the advancement of many of today's technology needs as the use of microelectronic products become engrained in our society. Cleanroom construction has averaged double-digit growth through the 1990's and into early 2000. Advances in factory technology have placed demands on all aspects of cleanroom design, construction, materials, and so on. Much of this growth has been centered in hot climate of the sunbelt. Energy efficiency has not been a high priority for the semiconductor industry in the past, since costs related to this issue have historically represented a relatively small percentage of overall operating costs. From a Semiconductor Industry website in October 2001: “Slashing energy consumption has become an unquestioned semiconductor industry goal.” Semiconductor Industry Association's International Technology Roadmap for Semiconductors has energy goals on the roadmap for power per unit of silicon processed; the World Semiconductor Council has policies for energy reduction, numerous publications, workshops, and seminars touting need for energy reduction. There is no longer any question that cutting energy usage makes good business sense, especially given rate increases being experienced in many parts of the country. This paper will present some of the methods being used by a multi-national semiconductor company to change the way they design and build cleanrooms with a focus on resource conservation, energy conservation methods, and cost of ownership. Various clean air and energy management scenarios will be compared with their potential for energy savings.
Naughton, P.; Schrecengost, R. (2004). Cleanroom Energy Optimization Methods. Energy Systems Laboratory (http://esl.tamu.edu); Texas A&M University (http://www.tamu.edu). Available electronically from