Self-assembled structures, method of manufacture thereof and articles comprising the same
Abstract
Disclosed herein is a graft block copolymer comprising a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety that comprises a halocarbon moiety, a silicon containing moiety, or a combination of a halocarbon moiety and a silicon containing moiety; a second block polymer; the second block polymer being covalently bonded to the first block; wherein the second block comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to undergo acid-catalyzed deprotection causing a change of solubility of the graft block copolymer in a developer solvent.
Subject
G03F 7/038C08F 293/005
C08G 61/08
C08L 51/003
G03F 7/0002
G03F 7/0045
G03F 7/0046
G03F 7/0395
G03F 7/0397
C08F 2438/03
C08G 2261/126
C08G 2261/128
C08G 2261/136
C08G 2261/1426
C08G 2261/3324
C08G 2261/418
C08G 2261/80
C08G 2261/90
C08F 220/1807
C08F 220/22
C08F 220/1807
C08F 220/22
C08F 220/283
Collections
Citation
Cho, Sangho; Sun, Guorong; Wooley, Karen L.; Thackeray, James W.; Trefonas, Peter III (2018). Self-assembled structures, method of manufacture thereof and articles comprising the same. United States. Patent and Trademark Office; Texas A&M University. Libraries. Available electronically from https : / /hdl .handle .net /1969 .1 /177268.