Browsing by Subject "nanopositioning"
Now showing items 1-2 of 2
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(Texas A&M University, 2004-09-30)This thesis presents the design and fabrication of a novel magnetically levitated (maglev) device with six-degree-of-freedom motion capability at nanometer precision. The applications of this device are manufacture of ...
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(Texas A&M University, 2005-11-01)This dissertation presents two novel 6-axis magnetic-levitation (maglev) stages that are capable of nanoscale positioning. These stages have very simple and compact structure that is advantageous to meet requirements in ...