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    • Vapor deposited micro heat pipes 

      Weichold, Mark H.; Peterson, George P.; Mallik, Arnab K. (United States. Patent and Trademark OfficeTexas A&M University. Libraries, 1993-01-12)
      A micro heat pipe, formed in a semiconductor substrate, carries heat from a region of heat flux in the substrate to a region of lower heat flux. The micro heat pipe is formed by cutting a groove into the substrate opposite ...