Abstract
Clean rooms for microelectronic manufacturing are becoming increasingly complex. As the space between the lines on the mask of the silicon chip approaches one and one-half microns, the need for ultra clean and precision controlled environments increases dramatically, and concurrently the sophistication of the mechanical system increases to meet those needs. Energy conservation is often overlooked in clean rooms due to the current state of the art. Described is a clean room consisting of 14,000 sq. ft. of Class 1,000 space using energy conservation to reduce the initial capital equipment investment and operating costs.
Cook, E. H. (1984). Energy Conservation in the Clean Environment: A Design for All Seasons. Energy Systems Laboratory (http://esl.tamu.edu); Texas A&M University (http://www.tamu.edu). Available electronically from
https : / /hdl .handle .net /1969 .1 /94657.